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The SMFL SNL sees many types of substrates and materials. Some pose cross-contamination threats.
We detail here the specifics on processing certain materials in the SMFL.
All tools in the SMFL SNL have a list of accepted materials. If your material/substrate is not on the accepted list for the tool, you may not run it.
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- Substrates with gold are allowed in very few tools and your process must be discussed before you start any work.
High Vapor Pressure Materials
- These are metals that are not allowed in our standardĀ PVD systems. We do have one system that is used to deposit zinc.
- They have vapor pressures high enough at lower temperatures that once they are in a PVD system - they will continually re-deposit on subsequent substrates.
- These materials are restricted in what tools they may be processed in. Please contact the staff and present a detailed process flow.
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