Suss MA150 Aligner

Facts

• The Suss MA150 Contact Aligner is a 1x aligner.
• The mask is brought into close contact with the substrate
  • The features on the mask are printed at the intended size for on the substrate - 1x designation.
  • The gap can be made larger for 'sticky' resists - subsequent loss of high frequency information - square corners become rounded.
  • Uses 5" x 5" x 0.09" or 6" x 6" x 0.09" soda lime photomasks.
  • 5" & 6" masks are held in special vacuum holders for use with 150mm wafers.
• Capable of features down to 2um in size

• It is configured for 150mm wafers and uses the mercury broadband for exposure.
• It also has an i-line filter for defining smaller features.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Any of these personnel can certify new users

Manuals & Users

• Suss MA150 Contact Aligner - Rev F - 5/8/20
• Suss MA150 Contact Aligner Certification Checklist - 2/2/21