Suss Labspin 6 General Coater

Facts

•  The Suss Labspin 6 General Spin Coater is used for non-positive photoresist applications.
  • Users to provide their own coating bowl and spin chucks - See SNL staff for purchase.
  • It has a nearby softbake hotplate.

• Chemistry
  
  • SU8, Polyimide, and Spin on Glass may be coated in this tool.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Any of these personnel can certify new users

Manuals

• Suss Labspin 6 General Spinner Manual - Rev A -
• Suss Labspin 6 General Coater Certification Checklist