Suss Labspin 6 Photoresist Spinner
Facts
- The Suss Labspin 6 is a Manual Photoresist Spin Coater.
- Users to provide their own spin shucks and bowls. See SNL staff for purchase.
- It has nearby softbake hotplate.
- Chemistry
- This manual spinner is used to coat MIR 701 Photoresist
- SU8, Polyimide, and Spin on Glass may not be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Any of these personnel can certify new users