Suss Labspin 6 Photoresist Spinner

Facts

• The Suss Labspin 6 is a Manual Photoresist Spin Coater.
  • Users to provide their own spin shucks and bowls.  See SNL staff for purchase.
  • It has nearby softbake hotplate.

• Chemistry
  • This manual spinner is used to coat MIR 701 Photoresist
  • SU8, Polyimide, and Spin on Glass may not be coated in this tool.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Any of these personnel can certify new users

Manuals

• Suss Labspin 6 Photoresist Coater Manual
• Suss Labspin 6 Photoresist Coater Certification Checklist