Bruce 2 - Tube 8

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Facts

Tube 8 is used for the high temperature annealing of silicon substrates.

• Tube is considered contaminated - not qualified for MOS grade process.

• It is equipped with heating elements capable of 1200C and has a silicon carbide tube

• Currently plumbed with nitrogen. Operated in manual mode.

• Wafers are loaded into quartz boats - current size is 100mm.

Other Tubes

• Bruce Tube 1 - Wet Oxide Growth

• Bruce Tube 2 - P type diffusion

• Bruce Tube 3 - N type diffusion

• Bruce Tube 4 - Dry Oxide Growth

• Bruce Tube 5 - External Torch Low Temp Oxide Growth

• Bruce Tube 6 - Wet Oxide Growth

• Bruce Tube 7 - Anneal

• Bruce Tube 8 - High Temp Anneal

Personnel

• Tool Engineer - 

• Process Engineer - Sean O'Brien

• Process Engineer - Patricia Meller

Tool & Process Information

• Bruce Furnace Recipe Request Sheet

  • If a new recipe is needed for the Bruce Furnace, fill out this sheet and return to Sean O'Brien

Manuals & Users