Plasmatherm ICP Cl Etcher

Owned by Thomas Grimsley

Last updated: Aug 02, 2024

1 min read

Facts

The system is currently plumbed with Cl2 and BCl3
Used for etching II-V materials

Personnel

Tool Engineer - John Nash
Process Engineer - Sean O'Brien
Super User - Matt Seitz
Any of these personnel can certify new users

Tool & Process Information

Manuals

Plasmatherm ICP Cl Etcher -