Plasmatherm ICP Cl Etcher

Facts

• The system is currently plumbed with Cl2 and BCl3
• Used for etching II-V materials 

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Super User - Matt Seitz
• Any of these personnel can certify new users

Tool & Process Information

Manuals

Plasmatherm ICP Cl Etcher -