Plasmatherm ICP Cl Etcher
- Thomas Grimsley
Owned by Thomas Grimsley
Facts
- The system is currently plumbed with Cl2 and BCl3
- Used for etching II-V materials
Personnel
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien
- Super User - Matt Seitz
- Any of these personnel can certify new users
Tool & Process Information
Manuals
Plasmatherm ICP Cl Etcher -