CEE Resist Coating Station
UserFacts
- The CEE is a Manual Photoresist Spin Coater.
- Set up for 100mm, 150mm round substrates
- It has nearby softbake hotplate.
- It has an HMDS vapor prime hotplate
- Chemistry
- This manual spinner is used to coat standard positive photoresists such as S1800 and MiR701
- SU8, Polyimide, and Spin on Glass may not be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - William Huang
- Superuser - Bryan Melanson
- Any of these personnel can certify new users