CEE Resist Coating Station

 UserFacts

• The CEE is a Manual Photoresist Spin Coater.

  • Set up for 100mm, 150mm round substrates

  • It has nearby softbake hotplate.

  • It has an HMDS vapor prime hotplate

• Chemistry

  • This manual spinner is used to coat standard positive photoresists such as S1800 and MiR701

  • SU8, Polyimide, and Spin on Glass may not be coated in this tool.

Personnel

• Tool Engineer - Rich Battaglia

• Process Engineer - Sean O'Brien

• Super User - William Huang

• Superuser - Bryan Melanson

• Any of these personnel can certify new users

Manuals

• CEE Manual Spin Coater Manual - Rev C - 05/12/20

• CEE Manual Spin Coater Certification Checklist - 8/9/08