Trion Apollo Asher

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Facts

• The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist. 

• The Asher detects endpoint by monitoring the 430nm optical signal from the plasma. 

• Wafers are processed between 200C and 300C. 

• The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.

• The system is currently plumbed with oxygen .

Personnel

• Tool Engineer - Rich Battaglia

• Process Engineer - Sean O'Brien

• Superuser - Matt Seitz

• Superuser - Patricia Meller

• Superuser - William Huang

• Any of these personnel can certify new users

Tool & Process Information

Manuals

• Trion Apollo Manual - Rev F - 9/25/20

• Trion Apollo Certification Checklist