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Trion Apollo Asher

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Trion Apollo Asher

Jan 11, 2024

Facts

  • The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist. 

  • The Asher detects endpoint by monitoring the 430nm optical signal from the plasma. 

  • Wafers are processed between 200C and 300C. 

  • The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.

  • The system is currently plumbed with oxygen .

Personnel

  • Tool Engineer - Rich Battaglia

  • Process Engineer - Sean O'Brien

  • Superuser - Matt Seitz

  • Superuser - Patricia Meller

  • Superuser - William Huang

  • Any of these personnel can certify new users

Tool & Process Information

 

Manuals