CHA Ebeam Evaporator

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Facts

• The CHA an electron beam Evaporation Tool.

  • Target material is loaded in crucible liners.

  • The system is capable of holding eight crucibles for multi-source deposition.

  • Dielectrics and metals can be deposited.

    • Materials with significant vapor pressures at lower temperatures (Sb, Cd, Zn, etc) are not allowed.

*The system has platens for 100mm and 150mm wafers

Personnel

• Tool Engineer - Rich Battaglia

• Process Engineer - Sean O'Brien

Tool & Process Information

• Supplier of crucible liners for the SNL CHA Evaporator

  • We use the Thermionics Model #A111460-XX. The XX stands for the material the crucible liner is made from and depends on the material to be evaporated

Manuals

CHA Evaporator Manual
CHA Evaporator Certification Checklist