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Wet Bench - BOE and Pad Etch
Facts
10:1 BOE Tank is for general oxide etching.
Pad Etch Tank is for etching oxide when aluminum is exposed. The etch rate of aluminum will be lower in Pad Etch than in regular BOE. It is important to note that the aluminum does still etch in this solution.
Personnel
Tool Engineer -
Process Engineer - Sean O'Brien
Process Engineer - Patricia Meller