Heidelberg DWL 66 Laser Writer

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Heidelberg DWL 66 Laser Writer

 

 


Facts

  • The DWL 66+ is a high-resolution imaging system developed to expose photoresist coatings on a variety of substrates.

    • Substrates up to 8" x  8" can be exposed.

    • Exposure wavelength is 405nm from a solid state laser.

    • The system is also the SMFL maskmaking tool.

  • Design data can be created by any program using DXF, Gerber, GDSII, or CIF format.

  • 3D structures in thick photoresist can be created by using the Advanced Gray Scale Exposure Mode.

  • Two lenses are available

    • 20mm head - 4.0um features

    • 4mm head - 0.8 um features

Personnel 

Tool & Process Information

Manuals & Users