SNL Chemistry SDS

SNL SDS Listing - Standard Chemistry

Below is a listing of standard chemistry found in the cleanroom.

Chemistry is listed by grouping.

If you don't know the type - do a search on this page - by pushing Control F

Chemicals in Bold are supplied by the SNL - others are the property of various researchers.

To import a new chemical into the cleanroom, you can find the SNL Imported Chemical Form here

AcidsUnlink

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Acetic Acid	Sigma Aldrich	4/27/14	SDS
Citric Acid	Alfa Aesar	9/3/13	SDS
Hydrofluoric Acid	Avantor	6/18/14	SDS
Hydrochloric Acid	Avantor	2/2/15	SDS
Phosphoric Acid	Avantor	6/24/15	SDS
Nitric Acid	Avantor	6/4/14	SDS
Sulfuric Acid	Avantor	2/2/15	SDS

Bases

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Ammonium Hydroxide	Avantor	3/4/15	SDS
Potassium Hydroxide	Avantor	6/5/14	SDS
Sodium Hydroxide	Avantor	6/23/14	SDS

Specialty Etchants

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Aluminum Etch 16-1-1-2	Fuji Film	12/6/18	SDS
Buffered Oxide Etch 10:1 (BOE)	Avantor	11/13/14	SDS
Buffered Oxide Etch 10:1 (BOE) w/ Surfactant	Fuji Film	5/13/19	SDS
Chrome Etch 9048S	Transene	5/1/19	SDS
Copper Etch CE100	Transene	5/1/19	SDS
Ferric Chloride	MG Chemicals	8/16/13	SDS
Freckle Etch	Fuji Film	9/25/17	SDS
Pad Etch	Fuji Film	10/4/18	SDS
Preferential Silicon Etch - PSE-200	Transene	6/1/19	SDS
Preferential Silicon Etch - PSE-300	Transene	3/1/22	SDS
Nichrome etchant	Transene	5/1/19	SDS

Photoresists / Lithographic Chemicals

Chemical/Trade Name	Manufacturer	Rev	SDS Link
495 PMMA Resist	Kayuku	10/10/14	SDS
950 PMMA Resist	Kayuku	8/14/19	SDS
APOL-LO 3200 Resist	KemLab	6/12/18	SDS
ARC ICon 7	Brewer Science	7/26/18	SDS
Aquatar Coating	AZ/Merck	7/31/18	SDS
AZ 12XT - 20PL-10	Brewer Science	3/17/20	SDS
AZ 1505 Photoresist	AZ/Merck	6/5/15	SDS
AZ 1512 Photoresist	AZ/Merck	2/27/20	SDS
AZ 1518 Photoresist	AZ/Merck	10/22/18	SDS
AZ 5214 Photoresist	Clariant	4/17/15	SDS
AZ 9260 Photoresist	AZ/Merck	8/19/19	SDS
AZ P4400 Photoresist	AZ	12/31/14	SDS
AZ-P4110 Photoresist	AZ	4/3/15	SDS
AZ P4620 Photoresist	AZ	8/13/15	SDS
AZ BARLI-II 90	AZ/Merck	7/11/17	SDS
HD 8961 Photoresist	HD Microsystems	2/13/23	SDS
Hexamethyldisilazane	Avantor	6/8/14	SDS
HPR 504 Resist	FujiFilm	2/11/15	SDS
HM 140 Resist	Irresistible Materials	2/24/15	SDS
KemLab IR	Kem Lab	6/19/18	SDS
KemLab IR LO	Kem Lab	1/1/24	SDS
KemLab KL 5300 Hi Res	Kem Lab	6/19/18	SDS
LOR A Resists	Kayaku	4/4/23	SDS
LOR B Resists	Kayaku	8/22/19	SDS
ma_n-2403	Microresist Technology	6/11/15	SDS
ma-P 1275G Photoresist	Microresist Technology	9/27/16	SDS
Megaposit SPR 220	Dupont	5/20/22	SDS
Microposit 1828 Resist	Dupont	3/1/21	SDS
MiR 701 Photoresist	AZ/Merck	5/2/19	SDS
MMA Co Resist	Kayaku	4/21/21	SDS
mr-DWL Series Photoresist	Microresist Technology	2/12/16	SDS
mr-D 526/532 Resist	Microresist Technology	10/20/16	SDS
nLOF 2020 Photoresist	AZ/Merck	4/17/15	SDS
NR9g-8000PY Photoresist	Futurrex	1/5/21	SDS
NR9g-1000PY Photoresist	Futurrex	5/1/15	SDS
NR9g-1500PY Photoresist	Futurrex	1/13/16	SDS
Omnicoat	Kayaku	5/10/23	SDS
P4400 Photoresist	AZ/Merck	12/31/14	SDS
PR1-1000A1 Photoresist	Futurrex	1/21/19	SDS
ProTEK B3 25	Brewer	7/13/15	SDS
ProTEK B3 Primer	Brewer	4/21/15	SDS
S1805 Photoresist	Dow/ Rohm& Haas	7/22/15	SDS
S1813 Photoresist	Dow/ Rohm& Haas	7/22/15	SDS
S1827 Photoresist	Dow/ Rohm& Haas	2/25/15	SDS
SEQR-RA501	Tawain Nanocrystals	8/23/21	SDS
SEQR-GA501	Tawain Nanocrystals	8/23/21	SDS
SEQR-GR191	Synth-Edge Advanced Materials	8/10/21	SDS
SEQR-RR191	Synth-Edge Advanced Materials	8/10/21	SDS
SEBK-RT401	Tawain Nanocrystals	8/23/21	SDS
SU-8 - Black	Gersteltec Sarl	1/6/17	SDS
SU-8	Gersteltec Sarl	1/6/17	SDS
SU-8 2000 Series Photoresist	Kayaku/MicroChem	9/11/19	SDS
SU-8 3000 Series Photoresist	Kayaku/MicroChem	9/18/19	SDS
Sumiresist PFI-88	Sumitomo Chemical	7/1/17	SDS
Waferbond HT	Brewer Science	8/11/20	SDS
ZEP 520A	ZEON	1/4/18	SDS

Spin on Glass

Chemical/Trade Name	Manufacturer	Rev	SDS Link
512B - Spin on Glass	Honeywell	8/25/15	SDS
Accuglass P112 SOG	Honeywell	11/19/14	SDS
B1500	Desert Silicon	4/6/16	SDS
B150X - Boron Spin on Dopant	Honeywell	1/5/15	SDS
B75X - Boron Spin on Dopant	Honeywell	1/5/15	SDS
NDG-7000R SOG	Desert Silicon	5/30/23	SDS
Filmtronics Boron Dopant - B153	Filmtronics	1/1/22	SDS
Filmtronics Boron Dopant - B154,B155	Filmtronics	1/1/22	SDS
Filmtronics Phosphorous Dopant	Filmtronics	1/1/22	SDS
IC1-200 - Dielectric Coating	Futurrex	1/31/18	SDS
Intervia Photodielectric 8023-10	Rohm & Haas	8/29/19	SDS
P8545SF Phosphorous Spin on Dopant	Filmtronics	3/26/18	SDS
PDC5 - Phosphorous Dopant Coating	Futurrex	1/31/18	SDS
Phosphorofilm	Emulsitone	5/1/15	SDS

Developers - Alkaline & Solvent

Chemical/Trade Name	Manufacturer	Rev	SDS Link
AZ 300 MIF Developer	Clariant	9/19/12	SDS
AZ 400 K 4:1 Developer	AZ	5/2/18	SDS
CD-26 Developer	Dow/ Rohm & Haas	9/1/20	SDS
Microposit 351 Developer	Dow/ Rohm & Haas	3/11/15	SDS
RD6 Developer	Futurrex	1/21/19	SDS
SEDR-5	Tawain Nanocrystals	8/23/21	SDS
SU8 Developer	MicroChem	9/18/19	SDS
ZED N50	Zeon	1/4/18	SDS

Solvents/Strippers

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Acetone	Avantor	6/17/14	SDS
AZ400T Stripper	EMD Electronics	12/27/19	SDS
AZ EBR	EMD Electronics	12/27/19	SDS
BTS-220 - PGMEA	JT Baker	9/17/14	SDS
Chloroform	Sigma Aldrich	3/18/23	SDS
Cyclohexanone	Sigma Aldrich	10/7/20	SDS
Isopropanol	Avantor	6/23/14	SDS
Methanol	Avantor	4/2/15	SDS
Nano Remover PG	Microchem	12/16/14	SDS
NMP	BDH - VWR	3/23/15	SDS
Protek Remover 100	Brewer Science	5/19/05	SDS
Styrene	TCI America	8/18/15	SDS
SU8 Thinner	MicroChem	7/2/13	SDS
Waferbond Remover	Brewer Science	8/25/20	SDS

Etch Gases

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Argon	Matheson/Air Gas	12/10/15	SDS
Boron Trichloride	Matheson/Air Products	9/6/15	SDS
Chlorine	Air Products	7/28/15	SDS
Difluoromethane R32 (CH₂F₂)	Airgas	8/15/15	SDS
Hexafluoroethane R116 (C₂F₆)	Airgas	4/16/13	SDS
Helium	Airgas	5/1/15	SDS
Nitrogen	Airgas	8/7/15	SDS
Octafluorocyclobutane (C₄F₈)	Airgas	1/26/15	SDS
Octafluoropropane (C₃F₈)	Matheson	6/13/12	SDS
Oxygen	Matheson	12/10/15	SDS
Sulfur Hexafluoride	Air Products	9/6/15	SDS
Tetrafluoromethane (CF₄)	Airgas	5/17/15	SDS
Trifluoromethane (CHF₃)	Airgas	10/20/14	SDS
Xenon Difluoride	Air Products	1/21/15	SDS

Deposition / Implant Gases

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Ammonia	Air Products	9/6/15	SDS
Boron Trifluoride	Air Liquide/Voltaix	9/22/15	SDS
Dichlorosilane	Air Products	9/6/15	SDS
Helium / Oxygen	Airgas	10/15/14	SDS
Hydrogen	Matheson	3/14/14	SDS
Methane	Airgas	2/20/24	SDS
Nitrogen Trifluroide	Airgas	5/20/15	SDS
Phosphine	Air Liquide/Voltaix	11/6/15	SDS
Silane	Air Products	9/6/15	SDS

ALD Gases

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Trimethylaluminum	Strem	4/25/14	SDS
Diethylzinc	Strem	4/25/14	SDS
Tetrakis Titanium	Strem	8/1/16	SDS

MOCVD Gases

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Arsine	Matheson	12/4/14	SDS
Disilane	Matheson	3/14/14	SDS
Forming Gas (5% H₂ in N₂)	Matheson	10/26/15	SDS
Hydrogen	Matheson	3/14/14	SDS
Phosphine	Matheson	12/10/12	SDS
Trimethylgallium (TMGa)	Dow/SAFC Hitec	4/20/15	SDS
Triethylgallium (TEGa)	Dow/SAFC Hitec	8/1/14	SDS
Trimethylindium (TMIn)	Dow/SAFC Hitec	12/11/15	SDS
Trimethylaluminum (TMAl)	Dow/SAFC Hitec	3/16/15	SDS
Tritertiarybutylaluminum (TTBAl)	Dow/SAFC Hitec	5/26/16	SDS
Triethylantimony	Dockweiler Chemicals	1/20/16	SDS
Trimethylantimony	Dow/SAFC Hitec	4/21/14	SDS
Tertiarybutylarsine	Dockweiler Chemicals	6/5/15	SDS
Carbontetrachloride	Dow/SAFC Hitec	4/9/15	SDS
Diethyltelluride	Dow/SAFC Hitec	8/14/14	SDS

Other

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Aluminum Chloride Hexahyrate	ThermoFisher	2/14/20	SDS
Aluminum Chloride Solution	ThermoFisher	2/25/20	SDS
Ammonium Sulfate	ThermoFisher	3/29/24	SDS
Ammonium Sulfide	Alfa Aesar	10/9/12	SDS
Bismuth(III) nitrate pentahydrate	Beantown Chemical	11/24/14	SDS
Copper Sulfate solution	Supelco	6/4/21	SDS
Cytonix PFC 160	Cytonix	5/23/16	SDS
First Contact Polymer Solution	First Contact Polymer	5/12/29	SDS
Ferric Chloride Hexahydrate	LabChem	6/14/17	SDS
Glycerol	Avantor	4/24/14	SDS
Hydrogen Peroxide	Avantor	6/11/14	SDS
Magnesium Chloride Solution	Sigma Aldrich	6/30/21	SDS
Nickel Sulfate Solution	Teknova	5/26/22	SDS
Nickel Sulfate Hexahydrate	ThermoFisher	2/14/20	SDS
Potassium Chloride	Sigma Aldrich	4/15/22	SDS
Silver Nitrate	Cascade Silver Company	1/1/15	SDS
Sodium Chloride Solution	ThermoFisher	4/23/22	SDS
Sodium Dodecyl Sulfate	Affymetrix	4/21/15	SDS
Sylgard 184 Silcone	Dow Corning	2/17/15	SDS
Sylgard 184 Silcone Curing Agent	Dow Corning	3/19/16	SDS
Titanium III Chloride Solution	Sigma Aldrich	9/23/21	SDS
Titanium IV Chloride	Sigma Aldrich	9/6/22	SDS
Teflon AF	DuPont	5/27/15	SDS
Tetraethyl Orthosilicate (TEOS)	Fuji	5/27/17	SDS
Trans LC	Schumacher	9/6/15	SDS
Wafer Bond HT -10.11	Brewer Science	8/11/20	SDS
Zinc Sulfate Solution	Sigma Aldrich	4/22/22	SDS

Metals / Deposition Materials

Aluminum	Lesker		SDS
Aluminum Oxide	Lesker		SDS
Chromium	Lesker		SDS
Copper	Lesker		SDS
Gallium Oxide	Sigma Alrich	6/25/14	SDS
Gold	Lesker		SDS
Hafnium	Lesker		SDS
Hafnium Oxide	Lesker		SDS
Indium	Lesker		SDS
Indium Oxide	Lesker		SDS
Indium Tin Oxide	Lesker		SDS
Molybdenum	Lesker		SDS
Nickel	Lesker		SDS
Palladium	Lesker		SDS
Platinum	Lesker		SDS
Silicon	Lesker		SDS
Silicon Dioxide	Lesker		SDS
Silicon Nitride	Lesker		SDS
Tantalum	Lesker		SDS
Titanium	Lesker		SDS
Tungsten	Lesker		SDS
Zinc Oxide	Lesker		SDS

SNL Lab Support Materials

Chemical/Trade Name	Manufacturer	Rev	SDS Link
Edwards Drystar Coolant	Edwards	12/23/22	SDS
Ethylene Glycol	Sigma Aldrich	2/26/15	SDS
Fomblin 06/6 Vacuum Oil	Inland	9/19/14	SDS
Fomblin 16/6 Vacuum Oil	Inland	9/19/14	SDS
Fomblin 25/6 Vacuum Oil	Inland	9/19/14	SDS
Leybonol LVO 400 Vacuum Oil	Oerlikon Leybold	4/4/22	SDS
Inland 45 Oil	Inland	3/1/16	SDS
Inland FF10 Flushing Fluid	Inland	12/1/22	SDS
Inland TW Oil	Inland	6/1/15	SDS
Invoil 20 Oil	Inland	3/1/16	SDS
Invoil 704 Oil	Inland	8/1/16	SDS
Dowfost Propylene Glycol	Dow	4/21/15	SDS
Ice Block	Hillside Chemicals	3/25/21	SDS
Novaclean - Floor & Lab	Micronova	6/15/15	SDS