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PE4400 Sputter
Facts
The PE24400 stepper is a RF Sputter Tool.
Designed as a sputter down system.
It is a loadlocked system.
It has sputter etch capability for pre-cleaning substrates prior to sputter deposition.
Three 8" water cooled targets.
The system has a large, flat platen that the samples simply rest on. It can accommodate many types of substrates.
Personnel
Tool Engineer - John Nash
Process Engineer - Sean O'Brien