Xactix Etcher

Facts

The Xactix Etcher is an non-plasma dry etch tool.

• It employs XeF₂ to bulk etch exposed silicon surfaces.
• It is intended as a release etch for silicon in MEMs applications
• It is not intended as a deep silicon etcher or a through-hole etcher, and is completely isotropic

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Any of these personnel can certify new users

Tool & Process Information

Manuals

• Xactix Etcher Manual
• Xactix Etcher Certification Checklist