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Xactix Etcher
Facts
The Xactix Etcher is an non-plasma dry etch tool.
It employs XeF2 to bulk etch exposed silicon surfaces.
It is intended as a release etch for silicon in MEMs applications
It is not intended as a deep silicon etcher or a through-hole etcher, and is completely isotropic
Personnel
Tool Engineer - John Nash
Process Engineer - Sean O'Brien
Any of these personnel can certify new users
Tool & Process Information
Manuals
Xactix Etcher Certification Checklist