Xactix Etcher

Owned by Thomas Grimsley

Last updated: Jan 11, 2024

1 min read

Facts

The Xactix Etcher is an non-plasma dry etch tool.

It employs XeF₂ to bulk etch exposed silicon surfaces.
It is intended as a release etch for silicon in MEMs applications
It is not intended as a deep silicon etcher or a through-hole etcher, and is completely isotropic

Personnel

Tool Engineer - John Nash
Process Engineer - Sean O'Brien
Any of these personnel can certify new users

Tool & Process Information

Manuals

Xactix Etcher Manual
Xactix Etcher Certification Checklist