CVC 601 Sputter

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Facts

• The CVC 601 sputtering system is a DC Sputter Tool.

  • Designed as a sputter up system.

  • Three 8" water cooled targets.

  • One 4" sputter head - easily changed.

• The system has platens for 100mm, 150mm, 5" square plates, and other drop-ins for other substrates

Personnel

• Tool Engineer - John Nash

• Process Engineer - Sean O'Brien

• Super User - Patricia Meller

• Superuser - Karl Hirschman

• Superuser - Eli Powell

Tool & Process Information

• Sputtering Information & References

• CVC 601 Cold/Hot Al Sputter for better step coverage

Manuals & Users

• CVC 601 Sputter System Manual - Rev J - 6/12/20

• CVC 601 Certification Checklist - 8/19/09