CVC 601 Sputter

Facts

• The CVC 601 sputtering system is a DC Sputter Tool.
  • Designed as a sputter up system.
  • Three 8" water cooled targets.
  • One 4" sputter head - easily changed.

• The system has platens for 100mm, 150mm, 5" square plates, and other drop-ins for other substrates

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Superuser - Karl Hirschman
• Superuser - Eli Powell

Tool & Process Information

• Sputtering Information & References
• CVC 601 Cold/Hot Al Sputter for better step coverage

Manuals & Users

• CVC 601 Sputter System Manual - Rev J - 6/12/20
• CVC 601 Certification Checklist - 8/19/09