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CVC 601 Sputter
Facts
The CVC 601 sputtering system is a DC Sputter Tool.
Designed as a sputter up system.
Three 8" water cooled targets.
One 4" sputter head - easily changed.
The system has platens for 100mm, 150mm, 5" square plates, and other drop-ins for other substrates
Personnel
Tool Engineer - John Nash
Process Engineer - Sean O'Brien
Super User - Patricia Meller
Superuser - Karl Hirschman
Superuser - Eli Powell
Tool & Process Information
Manuals & Users