Wet Bench - Nitride and Silicon Etch

Owned by Thomas Grimsley
May 26, 2022
1 min read

Facts

This wet bench is set up for a variety of chemical processes.

  • There is a heated quartz bath with a condensation coil for hot phosphoric acid etching of silicon nitride.
  • There is a heated quartz bath with potassium hydroxide (KOH) for crystallographic etching of silicon.
  • In addition, there are several tanks with BOE and Freckle Etch for silicon dioxide etching.

Personnel

Tool & Process Information

Manuals & Users