Wet Bench - Nitride and Silicon Etch

Facts

This wet bench is set up for a variety of chemical processes.

• There is a heated quartz bath with a condensation coil for hot phosphoric acid etching of silicon nitride.
• There is a heated quartz bath with potassium hydroxide (KOH) for crystallographic etching of silicon.

• In addition, there are several tanks with BOE and Freckle Etch for silicon dioxide etching.

Personnel

• Tool Engineer -
• Process Engineer - Sean O'Brien
• SuperUser - Patricia Meller

Tool & Process Information

• Process Information on Nitride Etching
• Process Information on Silicon Etching in KOH

Manuals & Users

• KOH & Hot Phosphoric Wetbench Manual - Rev J - 5/15/20
• KOH & Hot Phosphoric Wetbench Certification Checklist - 2/3/21