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Woollam VASE
Facts
The Woollam Vase is an ellipsometer with variable wavelength and angle of incidence. It is capable of
Reflection and Transmission Ellipsometry
Generalized Ellipsometry
Reflectance (R) intensity
Transmittance (T) intensity
Cross-polarized R/T
Depolarization
Scatterometry
Mueller-matrix
Its incident wavelength range is 200nm up to 2500nm (with different cable)
Personnel
Tool & Process Engineer - Sean O'Brien
Super User - Patricia Meller
Tool & Process Information
The Woollam VASE (Variable Angle Spectroscopic Ellipsometer) may be used to characterize thin films on a variety of substrates.
The HS-190 monochromater has a spectral range of 240-1700nm.
The system has two fiber optic cables. See a staff member for change and alignment.
UV150-2.0M Range 240-1700nm (except 1350-1420nm)
IR150-2.0M Range 270-1700nm
Transparent substrates should have the backside roughened or blackened to reduce reflections.