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RIT

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SNL Fab Services and Capabilities

The capabilities of the SMFL SNL include:

  • Wafer cleaning, ion implantation and diffusion, and high temperature processing both with conventional tube furnaces and RTP systems.

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  • Complete prototyping of devices and systems with help from the electrical and surface analytical characterization labs, microelectronics layout and computer simulation facilities, and in-house industry-standard electronics packaging capability.

The RIT SMFL SNL offers a wide range of services from single process up to foundry services.
It is by no means a complete list, please contact us so that we can discuss your needs.

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Foundry Services

The SMFL SNL has a 2um CMOS process with an effective L of 1.5um.

  • We have run this process for customers using their design and incorporating our test structure for test verification.
  • Aluminum and Tungsten gate metals have been processed - others are possible.
  • Our Vt's are well matched but implant splits are possible.
  • Typical run time is ~8 weeks

Details about the RIT SMFL CMOS Process, Performance, Specifications, and Options

If you require this information or a quote on your process, please contact T. Grimsley

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