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Facts
- The The CEE Manual Photoresist Spin Coater .3/8" & 3/4" spin chucks for smaller substratesis being decommisioned.
- Users to provide their own coating bowl and spin chucks
- It has a nearby softbake hotplate.
- Chemistry
- SU8, Polyimide, and Spin on Glass may be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Matt Seitz
- Superuser - William Huang
- Any of these personnel can certify new users