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Facts
- The CHA is a flash aluminum evaporation tool.
- Target material is a spool of aluminum wire fed onto a heated graphite bar.
- The system has platens for 100mm and 150mm wafers
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'BrienProcess Engineer - Patricia Meller
Tool & Process Information Information
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Manuals & Users
CHA Flash Manual
CHA Flash Evaporator Certification Checklist