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CHA Flash Evaporator
Facts
The CHA is a flash aluminum evaporation tool.
Target material is a spool of aluminum wire fed onto a heated graphite bar.
The system has platens for 100mm and 150mm wafers
Personnel
Tool Engineer - Rich Battaglia
Process Engineer - Sean O'Brien
Super User - Eli Powell
Tool & Process Information
Manuals
CHA Flash Manual
CHA Flash Evaporator Certification Checklist