CHA Flash Evaporator
Facts
- The CHA is a flash aluminum evaporation tool.
- Target material is a spool of aluminum wire fed onto a heated graphite bar.
- The system has platens for 100mm and 150mm wafers
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Eli Powell
Tool & Process Information
Manuals
CHA Flash Manual
CHA Flash Evaporator Certification Checklist