CHA Flash Evaporator

Facts

• The CHA is a flash aluminum evaporation tool.
  • Target material is a spool of aluminum wire fed onto a heated graphite bar.

• The system has platens for 100mm and 150mm wafers

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - Eli Powell

Tool & Process Information

Manuals

CHA Flash Manual
CHA Flash Evaporator Certification Checklist