Physical Vapor Deposition

Owned by Thomas Grimsley
Mar 21, 2019

Sputter Tools

CVC 601 Sputter

  • DC Targets

PE4400 Sputter

  • RF Targets, Loadlocked

Denton SEM Coater

  • DC gold foil sputter

Evaporation Tools

CHA Electron Beam Evaporator

  • Eight pocket system

CHA Flash Evaporator

  • Al flash evaporator

CVC Thermal Evaporator

  • General thermal evaporator

Other Information

PVD Process Information