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- It is configured for 150mm wafers and uses the mercury broadband for exposure.
- It also has an i-line filter for defining smaller features.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Any of these personnel can certify new users
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The Karl Suss MA150 contact mask aligner is a broadband exposure system capable of a variety of different mask and wafer configurations.
The standard chuck sizes are 100 mm and 150mm.
Mask holders come in 125mm, 150mm and 175mm.
It is possible to place a 125mm or 150mm mask on a 150mm wafer with one of the custom holders.
When laying out a mask, it is important to place any alignment marks along the center line because the alignment system has limited travel in the up and down directions.
Marks should be surrounded by a large open area if possible to make them easier to locate through the microscope.
Smaller wafers and pieces may be processed by placing them on a larger wafer with a small amount of water.
The larger wafer is necessary to make the vacuum sensor and the water helps hold the piece in place for alignment.
Manuals & Users
- Suss MA150 Contact Aligner - Rev F - 5/8/20
- Suss MA150 Contact Aligner Certification Checklist - 2/2/21