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Suss MA150 Aligner
Facts
The Suss MA150 Contact Aligner is a 1x aligner.
The mask is brought into close contact with the substrate
The features on the mask are printed at the intended size for on the substrate - 1x designation.
The gap can be made larger for 'sticky' resists - subsequent loss of high frequency information - square corners become rounded.
Uses 5" x 5" x 0.09" or 6" x 6" x 0.09" soda lime photomasks.
5" & 6" masks are held in special vacuum holders for use with 150mm wafers.
Capable of features down to 2um in size
It is configured for 150mm wafers and uses the mercury broadband for exposure.
It also has an i-line filter for defining smaller features.
Personnel
Tool Engineer - Rich Battaglia
Process Engineer - Sean O'Brien
Super User - Patricia Meller
Any of these personnel can certify new users
Process Information
The Karl Suss MA150 contact mask aligner is a broadband exposure system capable of a variety of different mask and wafer configurations.
The standard chuck sizes are 100 mm and 150mm.
Mask holders come in 125mm, 150mm and 175mm.
It is possible to place a 125mm or 150mm mask on a 150mm wafer with one of the custom holders.
When laying out a mask, it is important to place any alignment marks along the center line because the alignment system has limited travel in the up and down directions.
Marks should be surrounded by a large open area if possible to make them easier to locate through the microscope.
Smaller wafers and pieces may be processed by placing them on a larger wafer with a small amount of water.
The larger wafer is necessary to make the vacuum sensor and the water helps hold the piece in place for alignment.