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Facts
- The CEE Manual Photoresist Spin Coater.3/8" & 3/4" spin chucks for smaller substrates The Suss Labspin 6 General Spin Coater is used for non-positive photoresist applications.
- Users to provide their own coating bowl and spin chucks - See SNL staff for purchase.
- It has a nearby softbake hotplate.
- Chemistry
- SU8, Polyimide, and Spin on Glass may be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Matt Seitz
- Super User - Bryan Melanson
- Superuser - William Huang
- Any of these personnel can certify new users
Manuals
- CEE 100 Suss Labspin 6 General Spinner Manual - Rev A - 2/1/21CEE 100 General Spin
- Suss Labspin 6 General Coater Certification Checklist - 8/19/08