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Facts
- The CEE Suss Labspin 6 is a Manual Photoresist Spin Coater.
- Set up for 100mm and 150mm round substratesUsers to provide their own spin shucks and bowls. See SNL staff for purchase.
- It has nearby softbake hotplate.
- Chemistry
- This manual spinner is used to coat HPR504 PhotoresistThis manual spinner is used to coat MIR 701 Photoresist
- SU8, Polyimide, and Spin on Glass may not be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Eli Powell
- Super User - William Huang
- Any of these personnel can certify new users
Manuals
- CEE 100 Suss Labspin 6 Photoresist Spin Coater Manual - Rev C - 5/12/20CEE 100 Photoresist Spin
- Suss Labspin 6 Photoresist Coater Certification Checklist - 08/19/08