Facts
- The Suss MA150 Contact Aligner is a 1x aligner.
- The mask is brought into close contact with the substrate
- The features on the mask are printed at the intended size for on the substrate - 1x designation.
- The gap can be made larger for 'sticky' resists - subsequent loss of high frequency information - square corners become rounded.
- Uses 5" x 5" x 0.09" or 6" x 6" x 0.09" soda lime photomasks.
- 5" & 6" masks are held in special vacuum holders for use with 150mm wafers.
- Capable of features down to 2um in size
- It is configured for 150mm wafers and uses the mercury broadband for exposure.
- It also has an i-line filter for defining smaller features.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Any of these personnel can certify new users
Process Information
The Karl Suss MA150 contact mask aligner is a broadband exposure system capable of a variety of different mask and wafer configurations.
The standard chuck sizes are 100 mm and 150mm.
Mask holders come in 125mm, 150mm and 175mm.
It is possible to place a 125mm or 150mm mask on a 150mm wafer with one of the custom holders.
When laying out a mask, it is important to place any alignment marks along the center line because the alignment system has limited travel in the up and down directions.
Marks should be surrounded by a large open area if possible to make them easier to locate through the microscope.
Smaller wafers and pieces may be processed by placing them on a larger wafer with a small amount of water.
The larger wafer is necessary to make the vacuum sensor and the water helps hold the piece in place for alignment.
Manuals & Users
- Suss MA150 Contact Aligner - Rev F - 5/8/20
- Suss MA150 Contact Aligner Certification Checklist - 2/2/21