Facts
- The CEE is a Manual Photoresist Spin Coater.
- Set up for 100mm and 150mm round substrates.
- It has nearby softbake hotplate.
- Chemistry
- This manual spinner is used to coat HPR504 Photoresist
- This manual spinner is used to coat MIR 701 Photoresist
- SU8, Polyimide, and Spin on Glass may not be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Eli Powell
- Super User - William Huang
- Any of these personnel can certify new users