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Facts

  • The CEE is a Manual Photoresist Spin Coater.
    • Set up for 100mm and 150mm round substrates.
    • It has nearby softbake hotplate.
  • Chemistry
    • This manual spinner is used to coat HPR504 Photoresist
    • This manual spinner is used to coat MIR 701 Photoresist
    • SU8, Polyimide, and Spin on Glass may not be coated in this tool.

Personnel

Manuals & Users

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