Versions Compared

Version Old Version 1 New Version 2
Changes made by

Thomas Grimsley

Thomas Grimsley

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

...

  • Used for PECVD Deposition of TEOS Oxide

ASM LPCVD Tube 1

  • Used for LPCVD deposition of low temperature oxide

ASM LPCVD Tube 2

  • Used for LPCVD deposition of polysilicon and silicon nitride

Trion PECVD

  • Used for deposition of nitride and silicon dioxide on III-V materials/substrates

...