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Chemical Vapor Deposition
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Trion PECVD
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AME P5000 Chamber A
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Semiconductor and Nanofabrication Laboratory
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Chemical Vapor Deposition
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Chemical Vapor Deposition
Thomas Grimsley
Owned by
Thomas Grimsley
Last updated:
Jan 10, 2024
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AME P5000 Chamber A
Used for PECVD Deposition of TEOS Oxide
Trion PECVD
Used for deposition of nitride and silicon dioxide on III-V materials/substrates
Ultratech S200 ALD
Deposition of atomic layer films
{"serverDuration": 22, "requestCorrelationId": "06f108fb7be04b71a479f2f00aa1af14"}