Facts
- The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist.
- The Asher detects endpoint by monitoring the 430nm optical signal from the plasma.
- Wafers are processed between 200C and 300C.
- The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.
- The system is currently plumbed with oxygen .
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- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Superuser - Matt Seitz
- Superuser - Patricia Meller
- Superuser - William Huang
- Any of these personnel can certify new users
Tool & Process Information
Manuals
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- Trion Apollo Manual - Rev F - 9/25/20
- Trion Apollo Certification Checklist