Trion Apollo Asher

The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist. 

The Asher detects endpoint by monitoring the 430nm optical signal from the plasma. 

Wafers are processed between 200C and 300C. 

The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.

The system is currently plumbed with oxygen .

Tool Engineer - Rich Battaglia

Process Engineer - Sean O'Brien

Superuser - Matt Seitz

Superuser - Patricia Meller

Superuser - William Huang

Any of these personnel can certify new users

Trion Apollo Manual - Rev F - 9/25/20

Trion Apollo Certification Checklist