Trion Apollo Asher

Facts

• The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist. 
• The Asher detects endpoint by monitoring the 430nm optical signal from the plasma. 
• Wafers are processed between 200C and 300C. 
• The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.
• The system is currently plumbed with oxygen .

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Superuser - Matt Seitz
• Superuser - Patricia Meller
• Superuser - William Huang
• Any of these personnel can certify new users

Tool & Process Information

Manuals

• Trion Apollo Manual - Rev F - 9/25/20
• Trion Apollo Certification Checklist