Facts
The Woollam Vase is an ellipsometer with variable wavelength and angle of incidence. It is capable of
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller-matrix
Its incident wavelength range is 200nm up to 2500nm (with different cable)
Personnel
- Tool & Process Engineer - Sean O'Brien
- Process Engineer - Patricia Meller