Woollam VASE
Facts
The Woollam Vase is an ellipsometer with variable wavelength and angle of incidence. It is capable of
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller-matrix
Its incident wavelength range is 200nm up to 2500nm (with different cable)
Personnel
- Tool & Process Engineer - Sean O'Brien
- Super User - Patricia Meller
Tool & Process Information
The Woollam VASE (Variable Angle Spectroscopic Ellipsometer) may be used to characterize thin films on a variety of substrates.
- The HS-190 monochromater has a spectral range of 240-1700nm.
The system has two fiber optic cables. See a staff member for change and alignment.
- UV150-2.0M Range 240-1700nm (except 1350-1420nm)
- IR150-2.0M Range 270-1700nm
Transparent substrates should have the backside roughened or blackened to reduce reflections.