Metrology

Owned by Thomas Grimsley
May 26, 2022

Optical

Leitz Inspection Station

  • Optical linewidth measurement

Leica Inspection Station

  • Optical microscope with image capture

Olympus Microscope

  • Optical microscope with Nomarski Imaging

Nanometrics Spectrophotometers

  • Measurement of oxide, nitride

Rudolph AutoEL IV Ellipsometer

  • Ellipsometry of thin films

Woollam VASE Ellipsometer

  • Ellipsometry using variable angle, multi spectral

Wyko Dynamic Optical Profiler

  • Dynamic measurement of step heights using interferometry

Contact

CDE Res Map

  • Measurement of film resistivity

Tencor P2

  • Profilometer measurement of film steps