Metrology

Optical

Leitz Inspection Station

• Optical linewidth measurement

Leica Inspection Station

• Optical microscope with image capture

Olympus Microscope

• Optical microscope with Nomarski Imaging

Nanometrics Spectrophotometers

• Measurement of oxide, nitride

Rudolph AutoEL IV Ellipsometer

• Ellipsometry of thin films

Woollam VASE Ellipsometer

• Ellipsometry using variable angle, multi spectral

Wyko Dynamic Optical Profiler

• Dynamic measurement of step heights using interferometry

Contact

CDE Res Map

• Measurement of film resistivity

Tencor P2

• Profilometer measurement of film steps