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Metrology
Optical
Optical linewidth measurement
Optical microscope with image capture
Optical microscope with Nomarski Imaging
Nanometrics Spectrophotometers
Measurement of oxide, nitride
Rudolph AutoEL IV Ellipsometer
Ellipsometry of thin films
Ellipsometry using variable angle, multi spectral
Dynamic measurement of step heights using interferometry
Contact
Measurement of film resistivity
Profilometer measurement of film steps