Facts
- The CEE Manual Photoresist Spin Coater.
- 3/8" & 3/4" spin chucks for smaller substrates
- It has a nearby softbake hotplate.
- Chemistry
- SU8, Polyimide, and Spin on Glass may be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Matt Seitz
- Super User - Bryan Melanson
- Superuser - William Huang
- Any of these personnel can certify new users