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Facts
- The CEE is a Manual Photoresist Spin Coater.
- Set up for 100mm and 150mm round substrates.
- It has nearby softbake hotplate.
- Chemistry
- This manual spinner is used to coat HPR504 Photoresist
- This manual spinner is used to coat MIR 701 Photoresist
- SU8, Polyimide, and Spin on Glass may not be coated in this tool.
Personnel
Manuals & Users