Skip to end of metadata
Go to start of metadata

You are viewing an old version of this content. View the current version.

Compare with Current View Version History

« Previous Version 3 Next »

Facts

  • The CHA is a flash aluminum evaporation tool.
    • Target material is a spool of aluminum wire fed onto a heated graphite bar.
  • The system has platens for 100mm and 150mm wafers

Personnel

Tool & Process Information

Manuals & Users

CHA Flash Manual
CHA Flash Evaporator Certification Checklist


  • No labels