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Facts
- The CVC 601 sputtering system is a DC Sputter Tool.
- Designed as a sputter up system.
- Three 8" water cooled targets.
- One 4" sputter head - easily changed.
- The system has platens for 100mm, 150mm, 5" square plates, and other drop-ins for other substrates
Personnel
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Superuser - Karl Hirschman
- Superuser - Eli Powell
Tool & Process Information
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