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CVC 601 Step Coverage
This process improves the aluminum step coverage in the CVC 601 over the standard cold process.
It is intended for 0.75-1.0 um.
Cold/ Hot Sputter Process | Setpoints |
|---|---|
Argon Flow | 20sccm |
Power | 2000W |
Pressure | 5mT |
Process Sequence | Time |
|---|---|
Pre-sputter (shutter closed) | 300s |
Cold sputter (shutter open) | 250s |
Warm up (set heater timer for 17min) See instructions in CVC 601 Manual | 15min |
Hot sputter (approximately 200°C) | 1200s |