CVC 601 Step Coverage

Owned by Thomas Grimsley
Jul 31, 2013

This process improves the aluminum step coverage in the CVC 601 over the standard cold process.

It is intended for 0.75-1.0 um.

 

Cold/ Hot Sputter ProcessSetpoints
Argon Flow20sccm
Power2000W
Pressure5mT
Process SequenceTime
Pre-sputter (shutter closed)300s
Cold sputter (shutter open)250s

Warm up (set heater timer for 17min)

See instructions in CVC 601 Manual

15min

Hot sputter (approximately 200°C)

1200s