CVC 601 Step Coverage
- Thomas Grimsley
- Sean O'Brien
Owned by Thomas Grimsley
Jul 31, 2013
1 min read
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This process improves the aluminum step coverage in the CVC 601 over the standard cold process.
It is intended for 0.75-1.0 um.
| Cold/ Hot Sputter Process | Setpoints |
|---|---|
| Argon Flow | 20sccm |
| Power | 2000W |
| Pressure | 5mT |
| Process Sequence | Time |
|---|---|
| Pre-sputter (shutter closed) | 300s |
| Cold sputter (shutter open) | 250s |
Warm up (set heater timer for 17min) See instructions in CVC 601 Manual | 15min |
Hot sputter (approximately 200°C) | 1200s |