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Facts

  • The CVC 601 sputtering system is a DC Sputter Tool.
    • Designed as a sputter up system.
    • Three 8" water cooled targets.
    • One 4" sputter head - easily changed.
  • The system has platens for 100mm, 150mm, 5" square plates, and other drop-ins for other substrates

Personnel

Tool & Process Information

Manuals & Users


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