Mask Making

SNL Mask Making

Forms

• Mask Order Request Form (pdf)
• Guide to Filling out the Mask Order Request Form (pdf)

Current System

The Heidelberg DWL66+ system is used to write masks. The exposure wavelength is 405 nm (solid state laser)

We have the following substrates in stock - others can be purchased.

• 5" x 5" x 0.090" Soda Lime plates coated with AZ1500 positive resist.
• 6" x 6" x 0.120" Quartz plates coated with AZ1500 positive resist.

Current Pricing 

• Academic Customers
• External Customers

Disclaimers

• Once a mask has been delivered, the customer is responsible for inspection and acceptance. If you process in the SNL with a mask that is not right, but did not inspect, tool charges will not be reversed. We can not be held responsible for wafers lost due to processing with an incorrect mask.

• We will gladly make a new mask to correct any fracturing, limit errors on our part. If you make a mistake in your design, we will make every effort to re-write your mask as quickly as possible, you will be charged for the re-write.

Procedure

1. Fill out a SNL Mask Order Form. For help in filling out the form see the Guide document 
2. Submit your mask file to Sean O'Brien
3. You will be contacted with any questions about your mask and you will be given an expected delivery date and a quotation on the cost. 

4. Masks are usually written in the order received - we may batch mask jobs based on the feature sizes and the current write head installed on the Heidelberg.

5. Email your completed form and gds file to Sean O'Brien

Please contact T. Grimsley for help in submitting your job and a quote. Delivery is typically around 7 to 10 days depending on the mask queue and the status of the tool.