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SVG Track #1
Facts
The SVG 88 #1 is a photoresist coat & develop track.
Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
It has a coat track with HMDS vapor prime and softbake hotplate.
It has a develop track with post develop hardbake hotplate.
Manual dispense is allowed on this track.
Chemistry
The coat track is set to dispense MIR 701 positive photoresist.
The develop track dispenses CD 26 TMAH developer.
Personnel
Tool Engineer -Rich Battaglia
Process Engineer - Sean O'Brien
Any of these personnel can certify new users
Tool & Process Information