SVG Track #1

Facts

• The SVG 88 #1 is a photoresist coat & develop track.
  • Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
  • It has a coat track with HMDS vapor prime and softbake hotplate.
  • It has a develop track with post develop hardbake hotplate.
  • Manual dispense is allowed on this track.

• Chemistry
  • The coat track is set to dispense MIR 701 positive photoresist.
  • The develop track dispenses CD 26 TMAH developer.

Personnel

• Tool Engineer -Rich Battaglia
• Process Engineer - Sean O'Brien
• Any of these personnel can certify new users

Tool & Process Information

Manuals & Users

• SVG 1 Track Manual - Rev F - 10/24/18
• SVG 1 Certification Checklist