Title: Dry Etch  
Owner: Thomas Grimsley
Creator: Thomas Grimsley Jun 14, 2012
Last Changed by: Thomas Grimsley Mar 04, 2024
Tiny Link: (useful for email) https://rit-its.atlassian.net/wiki/x/V4DRAg
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Semiconductor Nanofabrication Laboratory (1)
    Page: Tool Set
Hierarchy
Children (8)
    Page: Plasmatherm ICP Cl Etcher
    Page: STS ASE Deep Silicon Etch
    Page: Trion Apollo Asher
    Page: Trion ICP Etcher
    Page: Trion Minilock Etcher
    Page: Trion Phantom III
    Page: Xactix Etcher
    Page: AME P5000 Chamber C
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Time Editor  
Mar 04, 2024 17:36 Thomas Grimsley View Changes
Feb 01, 2021 11:40 Thomas Grimsley  
Outgoing Links
Semiconductor Nanofabrication Laboratory (8)     Page: Trion ICP Etcher
    Page: AME P5000 Chamber C
    Page: Plasmatherm ICP Cl Etcher
    Page: Xactix Etcher
    Page: Trion Minilock Etcher
    Page: Trion Apollo Asher
    Page: STS ASE Deep Silicon Etch
    Page: Trion Phantom III