Trion Minilock Etcher

Facts

• The Trion Minilock etcher is a reactive ion etcher set up for 100 or 150mm wafers.
• The Trion is a loadlocked system and is used for the reactive ion etching of silicon dioxide.
• The system is currently plumbed with Argon, Oxygen, CHF₃ and CF₄.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - William Huang
• Any of these personnel can certify new users

Tool & Process Information

Manuals

• Trion Minilock Manual - Rev C - 11/8/11
• Trion Minilock Etcher Certification Checklist - 11/25/09