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Trion Minilock Etcher
Facts
The Trion Minilock etcher is a reactive ion etcher set up for 100 or 150mm wafers.
The Trion is a loadlocked system and is used for the reactive ion etching of silicon dioxide.
The system is currently plumbed with Argon, Oxygen, CHF3 and CF4.
Personnel
Tool Engineer - Rich Battaglia
Process Engineer - Sean O'Brien
Super User - William Huang
Any of these personnel can certify new users