AME P5000 Chamber C

Facts

The AME P5000 is a multi-chamber tool set up for a variety of processes

• Chamber C - RIE of Silicon Dioxide
  • CHF3, CF4, and O2 are used to  reactively ion etch silicon dioxide.

• Other Chambers
  • AME P5000 Chamber A - PECVD of TEOS Silicon Dioxide

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Any of these personnel can certify new users

Manuals

• P5000 Manual - Rev H - 4/6/17
• P5000 Certification Checklist - 9/17/09

Process Information

• Chamber C can only etch silicon wafers with clean backs.
• All oxide and nitride must be removed from the backs to prevent system arcing.
• Glass wafers are not allowed due to arcing.

P5000 Oxide Etch