Tencor P2


Facts

The Tencor profilometer is a long scan profilometer that is capable of measuring step heights, stress, surface roughness by moving a stylus over a defined step in the film to be measured.

Film stress can be determined by measuring the difference in wafer curvature before and after a film is deposited.

  • Model P2
  • Pieces to 8 inch wafers.
  • Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
  • Scan length up to 200 mm.
  • Stylus radius is 12 microns

Personnel

Process Information

  • Vertical Range of 13um - 1A Resolution
  • Vertical Range of 300um - 25A Resolution

Manuals & Users