Tencor P2
Facts
The Tencor profilometer is a long scan profilometer that is capable of measuring step heights, stress, surface roughness by moving a stylus over a defined step in the film to be measured.
Film stress can be determined by measuring the difference in wafer curvature before and after a film is deposited.
- Model P2
- Pieces to 8 inch wafers.
- Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
- Scan length up to 200 mm.
- Stylus radius is 12 microns
Personnel
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Super User - Karl Hirschman
Process Information
- Vertical Range of 13um - 1A Resolution
- Vertical Range of 300um - 25A Resolution